Silicon Nitride (Si+Si3N4) Wasfer
Silicon Nitride (Si+Si3N4) Wasfer
Standard specs of Si3N4 film on Si wafers / Specifiche standard Si wafers con Si3N4 film:
| Diameter | 4" |
| Thickness | 200 um, 375um, 500um |
| Film Thickness | 100nm, 200nm, 300nm |
| Prod. Mehod | LPCVD |
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