Silicon Carbide (SiC) Substrate
Silicon Carbide (SiC) Substrate
Standard specs of SiC substrate/ Specifiche standard dei substrati di SiC:
| Diameter | 2", 3", 4", 5" |
| Thickness | 330um, 350um, 500um |
| Dopant | Nitrogen, Semi-insulating |
| Polytype | 4H, 6H |
| Orientation | On-axis, 4°off axis |
| Si face polishing | Lapping, Optical polish, CMP, EPI-ready |
| Carbon face polishing | Lapping, Optical polish, CMP, EPI-ready |
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